Perfluoroether rubber (FFKM) is an excellent sealing material. Because of its superior performance, it has found widespread use throughout the semiconductor manufacturing system. One of the primary consumables required for the production of integrated circuits is perfluoroether sealing rings.
The main monomers in perfluoroether rubber are tetrafluoroethylene and perfluoroalkyl vinyl ether, which are copolymerized with a small amount of third monomers with vulcanization points. It is a rubber that contains no C-H bonds at all. The fluorine content of its molecular structure, the structure, and content of perfluorinated vinyl ether, and the bond energy and quantity of crosslinking bonds in the vulcanization process all influence the vulcanized compound's performance and glass transition temperature. The structure and components are different, as is their performance. The following are the primary performance characteristics of perfluoroether rubber:
1) Physical properties: The density is 1.9-2.0g/cm3, the physical and mechanical properties are similar to fluororubber, and the high temperature compression set is superior to fluororubber.
2) Chemical resistance: It is chemically resistant.
3) Resistance to high and low temperatures: the operating temperature is typically, 260-290 °C, but it can be used intermittently at 316 °C. Tg (glass transition temperature) of some perfluoroether rubbers is -19 °C.
4) Resistance to high-temperature steam.
5) Low precipitation and release.
6) Resistance to plasma.
It has high cleanliness and low precipitation product characteristics in the plasma environment, and it can withstand plasma impact for a long time. The reliability of elastomer gaskets is critical in semiconductor manufacturing, and the cost of stopping production to replace gaskets is extremely high. The requirements for the cleanliness and purity of the seals are extremely stringent in order to avoid potential risks. At the same time, the seals must be able to work for an extended period of time under the pressure of a high vacuum, corrosive chemical gases, and a high temperature environment.
Perfluoroether rubber raw materials are expensive and are commonly used in semiconductor manufacturing. It is resistant to plasma corrosion, gas corrosion, acid and alkali corrosion, high temperature corrosion, high cleanliness requirements for rubber seals, helps to maintain the integrity of the seal, reduces maintenance times and improves safety, and is the best seal for semiconductor manufacturing Material.
