what is Semiconductor Vacuum System Seals
The semiconductor vacuum system is one of the key equipment used to manufacture semiconductor devices. It is a closed system in a highly clean, low-pressure environment for handling and processing semiconductor materials and devices.
In semiconductor vacuum systems, high-performance rubber seals are often used due to the requirements for high cleanliness and low leakage rate. The following are the characteristics and material properties of rubber seals.
Characteristics of Semiconductor Vacuum System Seals
- High purity and low contamination: Semiconductor vacuum system seals are usually made of high-purity materials, such as FFKM materials, which have good trace metal content and vacuum integrity under harsh working conditions and high temperatures.
- High temperature resistance and temperature stability: The temperature changes greatly during semiconductor manufacturing, and the seal FFKM material is suitable for high-temperature wafer processing applications and has ultra-high temperature stability.
- Low permeability and low outgassing: In maintaining the integrity of the vacuum system, the seal has low permeability and low outgassing. This can reduce gas leakage and ensure the effective operation of the vacuum system.
- Anti-wear and low friction properties: In dynamic and rotating applications, seals exhibit good anti-wear and low friction properties to extend service life and reduce maintenance costs.
| FFKM 80 |
Property
|
Unit
|
Test method
|
Test parameter
|
Value
|
|
Hardness
|
Shore A | ASTM D 2240 |
80
|
||
|
Tensile Strength
|
MPa
|
ASTM D 412
|
13.5
|
||
|
Ultimate Elongation
|
%
|
ASTM D 412
|
104
|
||
|
Compression Set
|
%
|
ASTM D 395 B/1 | 70h / 200°C |
26
|
|
|
Specific Gravity
|
g/cm3
|
ASTM D 1817 |
2.43
|
||
|
Low temp. resistance
|
°C
|
ASTM D 1329
|
TR10
|
-2
|
Types of Semiconductor Vacuum System Seals
In semiconductor vacuum systems, in addition to rubber seals, rubber gaskets are often used to achieve effective sealing. Here are some common rubber seal types:
- O-ring gasket: O-ring is a rubber gasket with a circular cross-section and is widely used in semiconductor vacuum systems. It has good sealing performance and compression deformation ability and can adapt to different sealing requirements, such as pipe connections, valves, joints, etc.
- Flat seal: A flat seal is a flat rubber seal commonly used for flange connections in semiconductor vacuum systems. It achieves sealing through contact with the flange surface and is usually made of high-temperature chemical-resistant rubber material such as Viton or Silicone.
- U-shaped gasket: A U-shaped gasket is a U-shaped cross-section rubber gasket suitable for specific sealing needs in semiconductor vacuum systems. It is typically used to seal plungers, piston rods, cylinders, and other components, and has good sealing performance and resistance to compression deformation.
- V-shaped gasket: A V-shaped gasket is a V-shaped cross-section rubber gasket commonly used for valves and rotating shaft seals in semiconductor vacuum systems. It achieves effective sealing through contact with the sealing surface and has good sealing and wear resistance.
The selection of these rubber seals is determined according to the specific sealing requirements, working conditions, and media properties.
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